SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MEMS/MOEMS Components and Their Applications - Microaccelerometers using cured SU-8 as structural material

SPIE Proceedings [SPIE Micromachining an

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SPIE Proceedings [SPIE Micromachining an

✍ Henning, Albert K.; Janson, Siegfried W.; Henning, Albert K. 📂 Article 📅 2004 🏛 SPIE ⚖ 679 KB

SPIE Proceedings [SPIE Micromachining an

✍ Cheong, Jongpil; Goyal, Abhijat; Tadigadapa, Srinivas; Rahn, Christopher; Tanner 📂 Article 📅 2004 🏛 SPIE ⚖ 274 KB

SPIE Proceedings [SPIE Micromachining an

✍ Dauderstaedt, Ulrike A.; Duerr, Peter; Karlin, Tord; Schenk, Harald; Lakner, Hub 📂 Article 📅 2004 🏛 SPIE ⚖ 599 KB

SPIE Proceedings [SPIE Micromachining an

✍ Sparks, Douglas; Massoud-Ansari, Sonbol; Najafi, Nader; Tanner, Danelle M.; Rame 📂 Article 📅 2004 🏛 SPIE ⚖ 964 KB

SPIE Proceedings [SPIE MOEMS-MEMS 2007 M

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