SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

✍ Scribed by Dai, Wen; Wang, Wanjun; Tadigadapa, Srinivas A.; Ghodssi, Reza; Henning, Albert K.

• Book ID: 120666969
• Publisher: SPIE
• Year: 2007
• Weight: 471 KB
• Volume: 6464
• Category: Article
• DOI: 10.1117/12.705333