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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, CA (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - Silicon/porous silicon composite membrane for high-sensitivity pressure sensor

✍ Scribed by Sujatha, L.; Bhattacharya, Enakshi; Tadigadapa, Srinivas A.; Ghodssi, Reza; Henning, Albert K.

No coin nor oath required. For personal study only.

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