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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] MEMS/MOEMS Components and Their Applications - Confirmation of large-periphery compressible gas flow model for microvalves

✍ Scribed by Henning, Albert K.; Janson, Siegfried W.; Henning, Albert K.

Book ID: 120193794
Publisher: SPIE
Year: 2004
Weight: 679 KB
Volume: 5344
Category: Article
DOI: 10.1117/12.532665

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