SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Reliability, Testing, and Characterization of MEMS/MOEMS II - Electrical breakdown and ESD phenomena for devices with nanometer-to-micron gaps

✍ Scribed by Wallash, Albert J.; Levit, Larry; Ramesham, Rajeshuni; Tanner, Danelle M.

• Book ID: 111886944
• Publisher: SPIE
• Year: 2003
• Weight: 487 KB
• Volume: 4980
• Category: Article
• DOI: 10.1117/12.478191