SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Mechanical characterization of shape memory micromaterials

✍ Scribed by Kohl, Manfred; Skrobanek, K. D.; Goh, C. M.; Allen, David M.; Postek, Jr., Michael T.; Friedrich, Craig R.

• Book ID: 121508747
• Publisher: SPIE
• Year: 1996
• Weight: 789 KB
• Volume: 2880
• Category: Article
• DOI: 10.1117/12.250972