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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Numerical analysis of an optical motor based on the radiation pressure

โœ Scribed by Ohmachi, Yoshiro; Baba, Kazuhiro; Higurashi, Eiji; Chau, Kevin H.; Roop, Ray M.


Book ID
115514435
Publisher
SPIE
Year
1996
Weight
857 KB
Volume
2882
Category
Article

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