SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Microlithography and Metrology in Micromachining II - Cantilever with integrated Wheatstone bridge piezoresistive deflection sensor: analysis of force interaction measurement sensitivity

✍ Scribed by Gotszalk, Teodor; Rangelow, Ivo W.; Dumania, Piotr; Grabiec, Piotr B.; Postek, Jr., Michael T.; Friedrich, Craig R.

• Book ID: 120566149
• Publisher: SPIE
• Year: 1996
• Weight: 451 KB
• Volume: 2880
• Category: Article
• DOI: 10.1117/12.250959