SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachining and Microfabrication Process Technology II - Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

✍ Scribed by Smith, James H.; Montague, Stephen; Sniegowski, Jeffry J.; Murray, James R.; Manginell, Ronald P.; McWhorter, Paul J.; Huber, Robert J.; Pang, Stella W.; Chang, Shih-Chia

• Book ID: 121476237
• Publisher: SPIE
• Year: 1996
• Weight: 541 KB
• Volume: 2879
• Category: Article
• DOI: 10.1117/12.251218