SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microlithography and Metrology in Micromachining III - Photofabrication of the third dimension of NiTi shape memory alloy microactuators

✍ Scribed by Allen, David M.; Leong, Tony; Lim, Siang H.; Kohl, Manfred; Friedrich, Craig R.; Umeda, Akira

• Book ID: 121508749
• Publisher: SPIE
• Year: 1997
• Weight: 909 KB
• Volume: 3225
• Category: Article
• DOI: 10.1117/12.284549