SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Optical Microlithography XXI - Prediction of imaging performance of immersion lithography using high refractive index fluid

✍ Scribed by Sato, Takashi; Itoh, Masamitsu; Mimotogi, Akiko; Mimotogi, Shoji; Sato, Kazuya; Tanaka, Satoshi; Levinson, Harry J.; Dusa, Mircea V.

• Book ID: 121468038
• Publisher: SPIE
• Year: 2008
• Weight: 335 KB
• Volume: 6924
• Category: Article
• DOI: 10.1117/12.772283