SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 24 February 2008)] Optical Microlithography XXI - Integration of pixelated phase masks for full-chip random logic layers

✍ Scribed by Schenker, Richard; Bollepalli, Srinivas; Hu, Bin; Toh, Kenny; Singh, Vivek; Yung, Karmen; Cheng, Wen-hao; Borodovsky, Yan; Levinson, Harry J.; Dusa, Mircea V.

• Book ID: 121278177
• Publisher: SPIE
• Year: 2008
• Weight: 1012 KB
• Volume: 6924
• Category: Article
• DOI: 10.1117/12.771677