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Spectroscopic ellipsometry and photoluminescence measurements of as-deposited and annealed silicon rich oxynitride films

✍ Scribed by Sandeep Kohli; Jeremy A. Theil; Patrick R. McCurdy; Patricia C. Dippo; Richard K. Ahrenkiel; Christopher D. Rithner; Peter K. Dorhout

Book ID: 108290023
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 930 KB
Volume: 516
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2007.12.119

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