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FTIR and spectroscopic ellipsometry investigations of the electron beam evaporated silicon oxynitride thin films

✍ Scribed by S.H. Mohamed

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 707 KB
Volume: 406
Category: Article
ISSN: 0921-4526
DOI: 10.1016/j.physb.2010.10.045

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