✦ LIBER ✦
Determination of the thickness and refractive index of films on silicon using split-beam ellipsometry : N. V. Smith, Y. Komiya and R. H. Weissman, Solid-St. Electron. 12 (1969), p. 765
- Publisher
- Elsevier Science
- Year
- 1970
- Tongue
- English
- Weight
- 105 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0026-2714
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