New features of the layer-by-layer deposition of microcrystalline silicon films revealed by spectroscopic ellipsometry and high resolution transmission electron microscopy

✍ Scribed by Roca i Cabarrocas, P.; Hamma, S.; Hadjadj, A.; Bertomeu, J.; Andreu, J.

• Book ID: 120200726
• Publisher: American Institute of Physics
• Year: 1996
• Tongue: English
• Weight: 646 KB
• Volume: 69
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.117776