✦ LIBER ✦

Spatial structure of a planar magnetron discharge

✍ Scribed by Wendt, A. E.; Lieberman, M. A.

Book ID: 118130292
Publisher: AVS (American Vacuum Society)
Year: 1990
Tongue: English
Weight: 637 KB
Volume: 8
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.576894

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