𝔖 Bobbio Scriptorium
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Probe diagnostics op the planar magnetron discharge

✍ Scribed by L. Bárdoš; M. Libra; A. P. Krusteva


Book ID
118290424
Publisher
Springer
Year
1986
Tongue
English
Weight
185 KB
Volume
36
Category
Article
ISSN
0011-4626

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Numerical Models of the Planar Magnetron
✍ I. Kolev; A. Bogaerts 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 945 KB

## Abstract The outlines of two methods for numerical simulation ‐ hybrid and PIC/MCC of DC magnetrons are presented. Typical results from both of them are shown and compared. The hybrid model is faster, but has limited validity range. The PIC/MCC model, on the other hand, is stable for all operati