Langmuir probe diagnostics of the unbalanced magnetron discharge and its comparison with the classical magnetron

✍ Scribed by L. Bárdoš; M. Libra; J. Kracík

• Book ID: 112569934
• Publisher: Springer
• Year: 1991
• Tongue: English
• Weight: 206 KB
• Volume: 41
• Category: Article
• ISSN: 0011-4626
• DOI: 10.1007/bf01597954