Study of an argon magnetron discharge used for molybdenum sputtering. II. Spectroscopic analysis and comparison with the model

✍ Scribed by Guimaraes, F; Almeida, J B; Bretagne, J

• Book ID: 121434515
• Publisher: Institute of Physics
• Year: 1993
• Tongue: English
• Weight: 549 KB
• Volume: 2
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/2/3/002