✦ LIBER ✦
Influence of sticking coefficients on the behavior of sputtered atoms in an argon glow discharge: Modeling and comparison with experiment
✍ Scribed by Bogaerts, A.
- Book ID
- 121225957
- Publisher
- AVS (American Vacuum Society)
- Year
- 1998
- Tongue
- English
- Weight
- 598 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.581359
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