✦ LIBER ✦
Investigating the role of hydrogen in silicon deposition using an energy-resolved mass spectrometer and a Langmuir probe in an Ar/H2 radio frequency magnetron discharge
✍ Scribed by Mensah, S. L.; Naseem, Hameed H.; Abu-Safe, Husam; Gordon, M. H.
- Book ID
- 120487864
- Publisher
- American Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 986 KB
- Volume
- 19
- Category
- Article
- ISSN
- 1070-664X
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