Numerical Models of the Planar Magnetron Glow Discharges

✍ Scribed by I. Kolev; A. Bogaerts

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 945 KB
• Volume: 44
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.200410085

✦ Synopsis

Abstract

The outlines of two methods for numerical simulation ‐ hybrid and PIC/MCC of DC magnetrons are presented. Typical results from both of them are shown and compared. The hybrid model is faster, but has limited validity range. The PIC/MCC model, on the other hand, is stable for all operational conditions and does not require any assumptions, but is computationally expensive. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)