Influence of oxygen partial pressure on the glow discharge characteristics during dc reactive magnetron sputtering

✍ Scribed by G. Mohan Rao; S. Mohan

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 205 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90929-d