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The influence of oxygen partial pressure and total pressure (O2 + Ar) on the properties of tin oxide films prepared by dc sputtering

✍ Scribed by Li-jian Meng; MP dos Santos


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
517 KB
Volume
45
Category
Article
ISSN
0042-207X

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Influence of the Oxygen Partial Pressure
✍ Jiang, J.C. ;Li, B. ;Zhang, Z.Q. ;Hu, P.G. ;Zhang, F.S. ;Cheng, H.S. ;Yang, F.J. πŸ“‚ Article πŸ“… 2002 πŸ› John Wiley and Sons 🌐 English βš– 117 KB πŸ‘ 3 views

Quantitative depth profiling and compositional analysis of oxygen in TiO x film deposited on K9 glass was carried out using the resonant elastic scattering 16 O(a, a) 16 O at 3.045 MeV. By means of the resonance yield, the oxygen concentration in TiO x films as well as the oxygen-to-metal stoichiome