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Analytical characterization of a planar magnetron radio frequency glow-discharge source

✍ Scribed by M.J. Heintz; J.A.C. Broekaert; G.M. Hieftje

Book ID: 114254480
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 948 KB
Volume: 52
Category: Article
ISSN: 0584-8547
DOI: 10.1016/s0584-8547(96)01650-3

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