✦ LIBER ✦

A theory on planar magnetron discharge

✍ Scribed by Tsutomu Miura; Tatsuo Asamaki

Book ID: 113205295
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 306 KB
Volume: 281-282
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)08610-5

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