✦ LIBER ✦

Planar magnetron discharge for copper metallisation

✍ Scribed by OMND Teodoro; PAA Massa; ML Escrivão; AMC Moutinho; MJP Maneira

Book ID: 103463835
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 94 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90068-7

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