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Ionization of sputtered material in a planar magnetron discharge

✍ Scribed by Christou, C.; Barber, Z. H.

Book ID: 121702335
Publisher: AVS (American Vacuum Society)
Year: 2000
Tongue: English
Weight: 504 KB
Volume: 18
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1312370

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