Boron ion source based on planar magnetron discharge in self-sputtering mode

✍ Scribed by Gushenets, V. I.; Hershcovitch, A.; Kulevoy, T. V.; Oks, E. M.; Savkin, K. P.; Vizir, A. V.; Yushkov, G. Yu.

• Book ID: 121697491
• Publisher: American Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 347 KB
• Volume: 81
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.3258029