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Some recent trends in the preparation of thin layers by low pressure chemical vapour deposition

✍ Scribed by Michael L Hitchman; Waqar Ahmed

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 904 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90182-9

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