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A consideration of the effect of reactor parameters on the characteristics of layers prepared by low pressure chemical vapour deposition

✍ Scribed by M.L. Hitchman

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 891 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90070-8

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