✦ LIBER ✦

Simulation of plasma-etched lithographic structures

Book ID: 108390093
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 163 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)80583-5

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