✦ LIBER ✦

Simulation of lithographic images and resist profiles

✍ Scribed by W. Henke; G. Czech

Book ID: 103598204
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 359 KB
Volume: 11
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(90)90185-v

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