✦ LIBER ✦

Simulation of defects in 3-dimensional resist profiles in optical lithography

✍ Scribed by W. Henke; D. Mewes; M. Weiβ; G. Czech; R. Schieβl-Hoyler

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On simulation of resist profiles in elec

✍ P.R. Deshmukh; N.K.L. Raja; W.S. Khokle 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 354 KB

Computer simulation of resist heating in

✍ Z. Cui; J.R.A. Cleaver; H. Ahmed 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 319 KB

Simulation of resist development on wafe

✍ M. Weiβ; H.K. Oertel; J. Krauser 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 353 KB

Resist profile control of image reversal

✍ F. Pommereau; M. Iost; F. Vollenbroek; S. Gourrier 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 452 KB

A study of reticle defects imaged into t

✍ W. Henke; D. Mewes; M. Weiβ; G. Czech; R. Schieβl-Hoyler 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 1001 KB

Regularity of line defects in 3-dimensio

✍ K. Jänich; M. Rost 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 670 KB