✦ LIBER ✦

On simulation of resist profiles in electron beam lithography

✍ Scribed by P.R. Deshmukh; N.K.L. Raja; W.S. Khokle

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Computer simulation of resist heating in

✍ Z. Cui; J.R.A. Cleaver; H. Ahmed 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 319 KB

Simulation of defects in 3-dimensional r

✍ W. Henke; D. Mewes; M. Weiβ; G. Czech; R. Schieβl-Hoyler 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 520 KB

Characteristics of the resist developmen

✍ N.A. Madjarova 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 364 KB

Electron beam lithography resolution upo

✍ V.V. Aristov; V.A. Kudryashov; A.V. Chukalin 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 303 KB

Simulation of resist development on wafe

✍ M. Weiβ; H.K. Oertel; J. Krauser 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 353 KB

Nanostructure fabrication by electron be

✍ Wolfram Langheinrich; Heinz Beneking 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 425 KB