✦ LIBER ✦
Nanostructure fabrication by electron beam lithography on insulating substrates using a novel four-layer resist
✍ Scribed by Wolfram Langheinrich; Heinz Beneking
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 425 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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