✦ LIBER ✦

Computer simulation of resist heating in electron-beam lithography

✍ Scribed by Z. Cui; J.R.A. Cleaver; H. Ahmed

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On simulation of resist profiles in elec

✍ P.R. Deshmukh; N.K.L. Raja; W.S. Khokle 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 354 KB

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✍ A.A Svintsov; S.I. Zaitsev 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 379 KB

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✍ N.A. Madjarova 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 364 KB

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✍ V.V. Aristov; V.A. Kudryashov; A.V. Chukalin 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 303 KB

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✍ Dz-Chi Li; Jeng-Tzong Chen; Shiang-Woei Chyuan; Cherng-Ynan Sun 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 890 KB

Simulation of defects in 3-dimensional r

✍ W. Henke; D. Mewes; M. Weiβ; G. Czech; R. Schieβl-Hoyler 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 520 KB