✦ LIBER ✦

Simulation of heating in powerful electron lithography

✍ Scribed by A.A Svintsov; S.I. Zaitsev

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Computer simulation of resist heating in

✍ Z. Cui; J.R.A. Cleaver; H. Ahmed 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 319 KB

On simulation of resist profiles in elec

✍ P.R. Deshmukh; N.K.L. Raja; W.S. Khokle 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 354 KB

Hybrid simulation of electron cyclotron

✍ T. Ropponen; O. Tarvainen; P. Suominen; T.K. Koponen; T. Kalvas; H. Koivisto 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 918 KB

Computer simulations for mask structure

✍ Dz-Chi Li; Jeng-Tzong Chen; Shiang-Woei Chyuan; Cherng-Ynan Sun 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 890 KB

Computer simulation of cathode heating b

✍ C.B. McKee; John M.J. Madey 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 423 KB

Dynamic Simulation of the Electron Berns

✍ A. Cappa; D. López-Bruna; F. Castejón; M. Ochando; J.L. Vázquez-Poletti; F. Medi 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 830 KB