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Computer simulation of resist profiles at electron beam nanolithography

โœ Scribed by Katia Vutova; Elena Koleva; Georgy Mladenov; Ivan Kostic; Takeshi Tanaka

Book ID
104052528
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
378 KB
Volume
87
Category
Article
ISSN
0167-9317

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