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Modeling and simulation development of electron beam resist based on cellular automata

✍ Scribed by Li Ling; Long Shibing; Wang Congshun; Wu Wengang; Hao Yilong; Liu Ming

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 233 KB
Volume: 37
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2005.05.028

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