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Nanoscale structure formation by plasma etching

✍ Scribed by A. A. Golishnikov; M. G. Putrya; E. N. Rybachek

Book ID: 110215510
Publisher: Springer
Year: 2011
Tongue: English
Weight: 716 KB
Volume: 40
Category: Article
ISSN: 1063-7397
DOI: 10.1134/s1063739711070079

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