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Nanoscale dry etching of germanium by using inductively coupled CF4plasma

✍ Scribed by Kyu-Hwan Shim, Ha Yong Yang, Yeon-Ho Kil, Hyeon Deok Yang, Jong-Han Yang, Woong-Ki Hong, Sukill Kang, Tae Soo Jeong, Taek Sung Kim

Book ID: 118303704
Publisher: The Korean Institute of Metals and Materials
Year: 2012
Tongue: English
Weight: 509 KB
Volume: 8
Category: Article
ISSN: 1738-8090
DOI: 10.1007/s13391-012-1109-z

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