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Dry etching of LaNiO3 thin films using inductively coupled plasma

โœ Scribed by Gwan-Ha Kim; Dong-Pyo Kim; Kyoung-Tae Kim; Chang-Il Kim; Cheol-In Lee; Tae-Hyung Kim

Book ID
108289088
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
226 KB
Volume
506-507
Category
Article
ISSN
0040-6090

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u ร€ 2u scan for the as-deposited FePt film. The diffraction peaks associated with the formation of L1 0 ordered structure were clearly observed . Furthermore, the magnetic property of the film was investigated employing a superconducting quantum interference device (SQUID) magnetometer with the magn