✦ LIBER ✦

Plasma-induced damage in PZT thin films etched by inductively coupled plasma

✍ Scribed by Myoung-Gu Kang; Kyoung-Tae Kim; Chang-Il Kim

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Etching of platinum thin films in an ind

✍ Wuu, Dong-Sing; Kuo, Nai-Hao; Liao, Fang-Ching; Horng, Ray-Hua; Lee, Ming-Kwei 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 284 KB

Etching characteristics of TaN thin film

✍ Doo-Seung Um; Jong-Chang Woo; Chang-Il Kim 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 779 KB

Dry etching of LaNiO3 thin films using i

✍ Gwan-Ha Kim; Dong-Pyo Kim; Kyoung-Tae Kim; Chang-Il Kim; Cheol-In Lee; Tae-Hyung 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 226 KB

Etching characteristics of ZnO thin film

✍ S.W. Na; M.H. Shin; Y.M. Chung; J.G. Han; S.H. Jeung; J.H. Boo; N.-E. Lee 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 566 KB

The surface reaction on SrBi2Ta2O9 thin

✍ Dong-Pyo Kim; Chang-Il Kim 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 627 KB

Etching characteristics and plasma-induc

✍ Zuci Quan; Baishun Zhang; Tianjin Zhang; Tao Guo; Ruikun Pan; Juan Jiang 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 388 KB