✦ LIBER ✦

The surface reaction on SrBi2Ta2O9 thin films etched in Cl2/CF4/Ar inductively coupled plasma

✍ Scribed by Dong-Pyo Kim; Chang-Il Kim

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effects of O2 annealing after etching Sr

✍ Dong-Pyo Kim; Chang-Il Kim; Byoung-Gon Yu 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 511 KB

On the etching mechanism of ZrO2 thin fi

✍ Mansu Kim; Nam-Ki Min; Sun Jin Yun; Hyun Woo Lee; Alexander Efremov; Kwang-Ho Kw 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 205 KB

Model-based analysis of the silica glass

✍ Mansu Kim; Nam-Ki Min; Alexander Efremov; Hyun Woo Lee; Chi-Sun Park; Kwang-Ho K 📂 Article 📅 2007 🏛 Springer US 🌐 English ⚖ 371 KB