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Quantum Chemical Molecular Dynamics Simulation of the Plasma Etching Processes

✍ Scribed by Sasata, Katsumi; Yokosuka, Toshiyuki; Kurokawa, Hitoshi; Takami, Seiichi; Kubo, Momoji; Imamura, Akira; Shinmura, Tadashi; Kanoh, Masaaki; Selvam, Parasuraman; Miyamoto, Akira

Book ID
111952247
Publisher
Institute of Pure and Applied Physics
Year
2003
Tongue
English
Weight
273 KB
Volume
42
Category
Article
ISSN
0021-4922

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