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SIMS analysis of ultrathin implanted arsenic layers in silicon

✍ Scribed by D. S. Kibalov; O. M. Orlov; S. G. Simakin; V. K. Smirnov

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Depth profiling of shallow arsenic impla

✍ J. B. Clegg 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 585 KB

SIMS depth profiling of implanted layers

✍ VK Smirnov; SG Simakin 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 279 KB

SIMS round-robin study of depth profilin

✍ M. Tomita; T. Hasegawa; S. Hashimoto; S. Hayashi; Y. Homma; S. Kakehashi; Y. Kaz 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 147 KB

Tunnel measurement of density of states

✍ M.W. Denhoff 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 297 KB

Round-robin study of arsenic implant dos

✍ D. Simons; K. Kim; R. Benbalagh; J. Bennett; A. Chew; D. Gehre; T. Hasegawa; C. 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 229 KB

Auger analysis of ultrathin SiO2 layers

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 246 KB