Round-robin study of arsenic implant dose measurement in silicon by SIMS

✍ Scribed by D. Simons; K. Kim; R. Benbalagh; J. Bennett; A. Chew; D. Gehre; T. Hasegawa; C. Hitzman; J. Ko; R. Lindstrom; B. MacDonald; C. Magee; N. Montgomery; P. Peres; P. Ronsheim; S. Yoshikawa; M. Schuhmacher; W. Stockwell; D. Sykes; M. Tomita; F. Toujou; J. Won

• Book ID: 103818100
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 229 KB
• Volume: 252
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.02.152