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Round Robin: measurement of H implantation distributions in Si by elastic recoil detection

✍ Scribed by G Boudreault; R.G Elliman; R Grötzschel; S.C Gujrathi; C Jeynes; W.N Lennard; E Rauhala; T Sajavaara; H Timmers; Y.Q Wang; T.D.M Weijers

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